Laser vs. Blade Dicing for Direct Bonded Heterogeneous Integration (DBHi) Si Bridge

Aakrati Jain; Kamal Sikka; Juan-Manuel Gomez; Dishit P. Parekh; Marc Bergendahl; Jeroen van Borkulo; Kees Biesheuvel; Roman Doll; Mark Mueller

doi:10.1109/ectc32696.2021.00184

Laser vs. Blade Dicing for Direct Bonded Heterogeneous Integration (DBHi) Si Bridge

Identifier:nobleid.org/w1/20260525/FE360488

Type:Journal Article

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Laser vs. Blade Dicing for Direct Bonded Heterogeneous Integration (DBHi) Si Bridge

Identifier:nobleid.org/w1/20260525/FE360488

Type:Journal Article

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