Spectroscopic ellipsometry and polarimetry for materials and systems analysis at the nanometer scale: state-of-the-art, potential, and perspectives.

Losurdo M; Bergmair M; Bruno G; Cattelan D; Cobet C; de Martino A; Fleischer K; Dohcevic-Mitrovic Z; Esser N; Galliet M

doi:10.1007/s11051-009-9662-6

Spectroscopic ellipsometry and polarimetry for materials and systems analysis at the nanometer scale: state-of-the-art, potential, and perspectives.

Identifier:nobleid.org/w1/20260526/BC39D7B5

Type:Journal Article

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Spectroscopic ellipsometry and polarimetry for materials and systems analysis at the nanometer scale: state-of-the-art, potential, and perspectives.

Identifier:nobleid.org/w1/20260526/BC39D7B5

Type:Journal Article

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