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Fabrication of self-masked InP nanopillars by electron cyclotron resonance ion etching

Identifier:nobleid.org/w1/20260515/012BC2F4

Type:Journal Article

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Dipak Paramanik

C. Van Haesendonck

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Fabrication of self-masked InP nanopillars by electron cyclotron resonance ion etching | NobleID