In Line Electricalmonitor of Plasma-Enhanced Silicon Oxynitirde for 70-Nm Node or Beyond | NobleID

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In Line Electricalmonitor of Plasma-Enhanced Silicon Oxynitirde for 70-Nm Node or Beyond

NobleID: NI7P49W81R99S94
Persistent link: https://nobleid.org/ark:/48914/w1/20260515/0B7DB0AF

Type:Journal Article

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Timothy ST Chang

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