Room-temperature grain growth in sputter-deposited Cu films | NobleID

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Room-temperature grain growth in sputter-deposited Cu films

Identifier:nobleid.org/w1/20260515/174DBF79

Type:Journal Article

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Christophe Detavernier

Davy Deduytsche

R.L. Van Meirhaeghe

J. De Baerdemaeker

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