高功率脉冲磁控溅射技术的离子（粒子）特性及其对薄膜组织结构的影响

v1

Type:Journal Article

0 views

[![NobleID](https://www.nobleid.org/api/badge/394672CC.svg?ark=w1%2F20260515%2F394672CC)](https://nobleid.org/work/w1/20260515/394672CC)

ARK Inflections

Bibliometric Analysis

Impact metrics, research fronts, co-authorship networks →

Authors & Claims

Paper Authors