Selective ultrashort laser annealing of amorphous Ge/Si multilayer stacks

Nadezhda M. Bulgakova; В. А. Володин; Yuzhu Cheng; Yoann Lévy; Jiri T. Beranek; Siva S. Nagisetty; Martin Zukerstein; Alexander A. Popov; Alexander V. Bulgakov

doi:10.1051/epjconf/202226606012

Selective ultrashort laser annealing of amorphous Ge/Si multilayer stacks

Identifier:nobleid.org/w1/20260515/3BA778AF

Type:Conference Paper

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Alexander V. Bulgakov

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Selective ultrashort laser annealing of amorphous Ge/Si multilayer stacks

Identifier:nobleid.org/w1/20260515/3BA778AF

Type:Conference Paper

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Alexander V. Bulgakov

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