Ion sources for the varying needs of ion implantation | NobleID

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Ion sources for the varying needs of ion implantation

Identifier:nobleid.org/w1/20260515/467BBCD8

Type:Journal Article

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A. Hershcovitch

А. С. Бугаев

V. I. Gushenets

A. A. Kolomiets

G. N. Kropachev

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