Control of The Sb Redistribution in Strained SiGe Layers Using Point Defect Injection | NobleID

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Control of The Sb Redistribution in Strained SiGe Layers Using Point Defect Injection

Identifier:nobleid.org/w1/20260515/4CEFFABC

Type:Conference Paper

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A.Yu. Kuznetsovl

A. Nylandsted Larsenl

J. Lundsgaard Hansen

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