Correlation between carbon incorporation and defect formation in quasi-single crystalline silicon

Yuki Tsuchiya; Hiroki Kusunoki; Naoto Miyazaki; Takashi Sameshima; T. Tachibana; Takuto Kojima; Koji Arafune; Yoshio Ohshita; Haruhiko Ono; Atsushi Ogura

doi:10.1109/pvsc.2012.6317622

Correlation between carbon incorporation and defect formation in quasi-single crystalline silicon

Identifier:nobleid.org/w1/20260515/68ACDA84

Type:Journal Article

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Correlation between carbon incorporation and defect formation in quasi-single crystalline silicon

Identifier:nobleid.org/w1/20260515/68ACDA84

Type:Journal Article

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