Ru thin film grown on TaN by plasma enhanced atomic layer deposition

Qi Xie; Yu-Long Jiang; Jan Musschoot; Davy Deduytsche; Christophe Detavernier; R.L. Van Meirhaeghe; S. Van den Berghe; Guo-Ping Ru; Bing-Zong Li; Xin-Ping Qu

doi:10.1016/j.tsf.2009.03.001

Ru thin film grown on TaN by plasma enhanced atomic layer deposition

Identifier:nobleid.org/w1/20260515/6AC01AF5

Type:Journal Article

0 views

Support unavailableClaim Your Authorship

View Original Paper Source

Embeddable Badge

[![NobleID](https://www.nobleid.org/api/badge/6AC01AF5.svg?ark=w1%2F20260515%2F6AC01AF5)](https://nobleid.org/work/w1/20260515/6AC01AF5)

ARK Inflections

Metadata Policy

Metadata Formats

Bibliometric Analysis

Impact metrics, research fronts, co-authorship networks →

Authors & Claims

Paper Authors

Christophe Detavernier

Claim authorship of this work

Ru thin film grown on TaN by plasma enhanced atomic layer deposition

Identifier:nobleid.org/w1/20260515/6AC01AF5

Type:Journal Article

0 views

Support unavailableClaim Your Authorship

View Original Paper Source

Embeddable Badge

[![NobleID](https://www.nobleid.org/api/badge/6AC01AF5.svg?ark=w1%2F20260515%2F6AC01AF5)](https://nobleid.org/work/w1/20260515/6AC01AF5)

ARK Inflections

Metadata Policy

Metadata Formats

Bibliometric Analysis

Impact metrics, research fronts, co-authorship networks →

Authors & Claims

Paper Authors

Christophe Detavernier

Claim authorship of this work