Circuit fabrication at 17 nm half-pitch by nanoimprint lithography.

Gun-Young Jung; Ezekiel Johnston-Halperin; Wei Wu; Zhaoning Yu; Shih-Yuan Wang; William M Tong; Zhiyong Li; Jonathan E Green; Bonnie A Sheriff; Akram Boukai

doi:10.1021/nl052110f

Circuit fabrication at 17 nm half-pitch by nanoimprint lithography.

Identifier:nobleid.org/w1/20260515/6CB2FD00

Type:Journal Article

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Ezekiel Johnston-Halperin

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Circuit fabrication at 17 nm half-pitch by nanoimprint lithography.

Identifier:nobleid.org/w1/20260515/6CB2FD00

Type:Journal Article

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Ezekiel Johnston-Halperin

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