High rate PECVD of a-C:H coatings in a hollow cathode arc plasma | NobleID

Main

Mint Work Search Explore Works Knowledge Graph Citation Graph Bibliometrics Receipts

v1

High rate PECVD of a-C:H coatings in a hollow cathode arc plasma

Identifier:nobleid.org/w1/20260515/7AFB37CF

Type:Conference Paper

0 views

Support unavailableClaim Your Authorship

View Original Paper Source

Embeddable Badge

[![NobleID](https://www.nobleid.org/api/badge/7AFB37CF.svg?ark=w1%2F20260515%2F7AFB37CF)](https://nobleid.org/work/w1/20260515/7AFB37CF)

ARK Inflections

Metadata Policy

Metadata Formats

Bibliometric Analysis

Impact metrics, research fronts, co-authorship networks →

Authors & Claims

Paper Authors

Burkhard Zimmermann

Heidrun Klostermann

Claim authorship of this work

info@nobleid.org

About FAQ Terms Policy Persistence & Resolver Service Policy Pricing