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Dual-mode device for in situ testing of MEMS packaging quality

Identifier:nobleid.org/w1/20260515/7D3C02AF

Type:Journal Article

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Matthijs Suijlen

C. van der Avoort

J.T.M. van Beek

H. C. W. Beijerinck

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Dual-mode device for in situ testing of MEMS packaging quality | NobleID