Oxygen and hydrogen sorption in thermally activated yttrium-based getter thin films for MEMS vacuum packaging

Charlotte Kutyla; Sylvain Lemettre; Clément Bessouet; Alain Bosseboeuf; Philippe Coste; Thierry Sauvage; Olivier Wendling; Aurélien Bellamy; Piyush Jagtap; S. Escoubas

doi:10.1109/dtip56576.2022.9911710

Oxygen and hydrogen sorption in thermally activated yttrium-based getter thin films for MEMS vacuum packaging

Identifier:nobleid.org/w1/20260515/8EBDF369

Type:Journal Article

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Oxygen and hydrogen sorption in thermally activated yttrium-based getter thin films for MEMS vacuum packaging

Identifier:nobleid.org/w1/20260515/8EBDF369

Type:Journal Article

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