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Development of nonresonant ultrasonic motor with sub-nanometer resolution | NobleID

v1

Development of nonresonant ultrasonic motor with sub-nanometer resolution

Yoshiya Egashira, Kouji Kosaka, Taishi Endo, Hiroyuki Hashiguchi and 6 more

YE

Yoshiya Egashira

NobleIDNI1P24W74R48S87

Type:Journal Article

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