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利用釤-鈷溶劑進行氣-液-固機制生長碳化矽薄膜之研究

Identifier:nobleid.org/w1/20260515/AF8FB075

Type:Journal Article

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利用釤-鈷溶劑進行氣-液-固機制生長碳化矽薄膜之研究 | NobleID