A General Methodology to Predict the Reliability of Single-Crystal Silicon MEMS Devices | NobleID

Main

Mint Work Search Explore Works Knowledge Graph Citation Graph Bibliometrics Receipts

v1

A General Methodology to Predict the Reliability of Single-Crystal Silicon MEMS Devices

Identifier:nobleid.org/w1/20260515/CDA91CE0

Type:Journal Article

0 views

Support unavailableClaim Your Authorship

View Original Paper Source

Embeddable Badge

[![NobleID](https://www.nobleid.org/api/badge/CDA91CE0.svg?ark=w1%2F20260515%2FCDA91CE0)](https://nobleid.org/work/w1/20260515/CDA91CE0)

ARK Inflections

Metadata Policy

Metadata Formats

Bibliometric Analysis

Impact metrics, research fronts, co-authorship networks →

Authors & Claims

Paper Authors

Alissa Fitzgerald

David M. Pierce

Brent M. Huigens

Claim authorship of this work

info@nobleid.org

About FAQ Terms Policy Persistence & Resolver Service Policy