HPPMS deposition from composite targets: Effect of two orders of magnitude target power density changes on the composition of sputtered Cr-Al-C thin films

Holger Rueß; Moritz to Baben; Stanislav Mráz; Lin Shang; P. Polcik; S. Kolozsvári; Marcus Hans; Daniel Primetzhofer; Jochen M. Schneider

doi:10.1016/j.vacuum.2017.08.048

HPPMS deposition from composite targets: Effect of two orders of magnitude target power density changes on the composition of sputtered Cr-Al-C thin films

Identifier:nobleid.org/w1/20260515/CE05ACCF

Type:Journal Article

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HPPMS deposition from composite targets: Effect of two orders of magnitude target power density changes on the composition of sputtered Cr-Al-C thin films

Identifier:nobleid.org/w1/20260515/CE05ACCF

Type:Journal Article

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