Wafer-bonding workshop for MEMS technologies (WBW-MEMS), 11---12 October 2004, Halle | NobleID

Main

Mint Work Search Explore Works Knowledge Graph Citation Graph Bibliometrics Receipts

v1

Wafer-bonding workshop for MEMS technologies (WBW-MEMS), 11---12 October 2004, Halle

NobleID: NI9P08W21R91S18
Persistent link: https://nobleid.org/ark:/48914/w1/20260515/CF6F0C6D

Type:Journal Article

0 views

Support unavailableClaim Your Authorship

Embeddable Badge

[![NobleID](https://www.nobleid.org/api/badge/CF6F0C6D.svg?ark=w1%2F20260515%2FCF6F0C6D&value=id)](https://nobleid.org/work/w1/20260515/CF6F0C6D)

ARK Inflections

Metadata Policy

Metadata Formats

Bibliometric Analysis

Impact metrics, research fronts, co-authorship networks →

Authors & Claims

Paper Authors

Claim authorship of this work

info@nobleid.org

About FAQ Terms Policy Persistence & Resolver Service Policy