v1
Effect of thickness on moisture barrier properties of aluminum oxide using ozone-based atomic layer deposition
Identifier:nobleid.org/w1/20260515/DF5220A3
Type:Journal Article
0 views
Embeddable Badge
[](https://nobleid.org/work/w1/20260515/DF5220A3)
Bibliometric Analysis
Impact metrics, research fronts, co-authorship networks →
Authors & Claims