v1
制限反応スパッタ法によるゲート絶縁膜用ZrO_2薄膜のアニール効果の検討(薄膜プロセス・材料,一般)
Identifier:nobleid.org/w1/20260515/E8FD6ECF
Type:Journal Article
0 views
Bibliometric Analysis
Impact metrics, research fronts, co-authorship networks →
Authors & Claims
Bibliometric Analysis
Impact metrics, research fronts, co-authorship networks →