An investigation of polysilicon emitter bipolar transistors with an ozonized polysilicon/monosilicon interface

S. Niel; C. Hernández; R. Pantel; I. Sagnes; Marina Berenguer; J. Kirtsch; A. Monroy; A. Chantre; G. Vincent

doi:10.1109/essderc.1997.194454

An investigation of polysilicon emitter bipolar transistors with an ozonized polysilicon/monosilicon interface

Identifier:nobleid.org/w1/20260515/FE2F245F

Type:Conference Paper

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An investigation of polysilicon emitter bipolar transistors with an ozonized polysilicon/monosilicon interface

Identifier:nobleid.org/w1/20260515/FE2F245F

Type:Conference Paper

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