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Comparison of ICP-AlOx and ALD-Al2O3 Layers for the Rear Surface Passivation of C-Si Solar Cells
NobleIDNI2P13W80R72S35
Type:Journal Article
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Boris Veith
Thorsten Dullweber
Michael Siebert
Christopher Kranz
Florian Werner
N.-P. Harder
Jan Schmidt
B.F.P. Roos
Torsten Dippell
Rolf Brendel