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Processing thick multilevel polyimide films for 3-D stacked memory | NobleID

v1

Processing thick multilevel polyimide films for 3-D stacked memory

Michael Caterer, T. Daubenspeck, T.G. Ference, Steven J. Holmes, Richard Quinn

MC

Michael Caterer

NobleIDNI2P30W89R27S56

Type:Journal Article

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