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X-Ray metrology of nanowire/ nanosheet FETs for advanced technology nodes | NobleID

v1

X-Ray metrology of nanowire/ nanosheet FETs for advanced technology nodes

Madhulika Korde, Joseph Kline, Daniel F. Sunday, Nick Keller and 4 more

MK

Madhulika Korde

NobleIDNI9P28W37R68S54

Type:Journal Article

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