Tunneling currents and reliability of atomic-layer-deposited SiBCN for low-κ spacer dielectrics

Southwick, Richard G.; Sathiyanarayanan, Rajesh; Bajaj, Mohit; Mehta, S.; Yamashita, T.; Gundapaneni, Suresh; Pandey, R. K.; Wu, Ernest Y.; Murali, K. V. R. M.; Cohen, Sidney

doi:10.1109/irps.2014.6861115

Tunneling currents and reliability of atomic-layer-deposited SiBCN for low-κ spacer dielectrics

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Rajesh Sathiyanarayanan

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Tunneling currents and reliability of atomic-layer-deposited SiBCN for low-κ spacer dielectrics

NobleIDNI9P65W20R76S34

Type:Journal Article

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Rajesh Sathiyanarayanan

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Tunneling currents and reliability of atomic-layer-deposited SiBCN for low-κ spacer dielectrics

Tunneling currents and reliability of atomic-layer-deposited SiBCN for low-κ spacer dielectrics