Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering

Suchaneck, G.; Labitzke, R.; Adolphi, B.; Jastrabı́k, L.; Adámek, P.; Drahokoupil, Jan; Hubička, Zdeněk; Киселев, Д. А.; Kholkin, Andréi L.; Gerlach, Gerald

doi:10.1016/j.surfcoat.2011.02.050

Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering

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Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering

NobleIDNI2P60W40R15S96

Type:Journal Article

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