Combinatorial Generation and Analysis of Nanometer- and Micrometer-Scale Silicon Features via “Dip-Pen” Nanolithography and Wet Chemical Etching | NobleID
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Combinatorial Generation and Analysis of Nanometer- and Micrometer-Scale Silicon Features via “Dip-Pen” Nanolithography and Wet Chemical Etching
Dana A. Weinberger, Seok Hoon Hong, Chad A. Mirkin, Bruce W. Wessels, Thomas B. Higgins