Main

Mint Work Search Explore Works Knowledge Graph Citation Graph Bibliometrics Receipts

info@nobleid.org

About Fund our work FAQ Developers Terms Policy Persistence & Resolver Service Policy

Impact of target geometry on deposition uniformity in IPVD system | NobleID

v1

Impact of target geometry on deposition uniformity in IPVD system

Jozef Brčka, R.L. Robison

JB

Jozef Brčka

NobleIDNI0P44W69R46S12

Type:Journal Article

Claim Your Authorship

Sign in to see the full record

Creating an account is free.

Create an account

For data access, contact info@nobleid.org.