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Control of Sidewall Angles Using UV LEDs during Wet Etching of GaAs | NobleID

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Control of Sidewall Angles Using UV LEDs during Wet Etching of GaAs

Hee Taek Yi, Madhavi Thakurdesai, M. A. Parker

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Hee Taek Yi

NobleIDNI0P31W25R54S53

Type:Journal Article

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