Toward 17Âµm pitch heterogeneously integrated Si/SiGe quantum well bolometer focal plane arrays

Ericsson, Per; Fischer, Andreas; Forsberg, Fredrik; Roxhed, Niclas; Samel, Björn; Savage, Susan; Stemme, Göran; Wissmar, Stanley; Öberg, Olof; Niklaus, Frank

doi:10.1117/12.883827

Toward 17Âµm pitch heterogeneously integrated Si/SiGe quantum well bolometer focal plane arrays

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Type:Conference Paper

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Toward 17Âµm pitch heterogeneously integrated Si/SiGe quantum well bolometer focal plane arrays

NobleIDNI2P31W47R16S59

Type:Conference Paper

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