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Krypton incorporation in sputtered silicon films | NobleID

v1

Krypton incorporation in sputtered silicon films

Marcel J. W. Greuter, L. Niesen, Rudi A. Hakvoort, J. de Roode and 3 more

MG

Marcel J. W. Greuter

NobleIDNI1P48W54R85S13

Type:Journal Article

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