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Channeling as a mechanism for dry etch damage in GaN | NobleID

v1

Channeling as a mechanism for dry etch damage in GaN

Elaine D. Haberer, Ching‐Hui Chen, A. Abare, Monica Hansen and 4 more

EH

Elaine D. Haberer

NobleIDNI7P58W14R74S02

Type:Journal Article

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