Transfer etching of bilayer resists in oxygen-based plasmas

Mahorowala, Arpan P.; Babich, Katherina; Lin, Qinghuang; Medeiros, David R.; Petrillo, Karen; Simons, John P.; Angelopoulos, Marie; Sooriyakumaran, Ratnam; Hofer, D. D.; Reynolds, Geoffrey W.

doi:10.1116/1.582363

Transfer etching of bilayer resists in oxygen-based plasmas

NobleIDNI8P28W40R03S91

Type:Journal Article

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Ratnam Sooriyakumaran

D. D. Hofer

Geoffrey W. Reynolds

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Transfer etching of bilayer resists in oxygen-based plasmas

NobleIDNI8P28W40R03S91

Type:Journal Article

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Ratnam Sooriyakumaran

D. D. Hofer

Geoffrey W. Reynolds

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