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Relation Between Solubility of Silicon in High-k Oxides and the Effect of Fermi Level Pinning
NobleIDNI9P71W96R49S16
Type:Journal Article
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Naoto Umezawa
Kenji Shiraishi
Kuniyuki Kakushima
Hiroshi Iwai
Kenji Ohmori
Keisaku Yamada
Toyohiro Chikyow